Safety in Cleanrooms

Safety in Cleanrooms

Course structure Prepare for safety course Self study: - Cleanroom rules - Rules for working with wet chemistry Theoretical safety course First part of today Wet chemistry course Second part of today Ends with written test of both theoretical and practical aspects DTU Danchip 2

Course agenda first part 1. Working with chemicals 2. Personal protection 3. Alarms and evacuation 4. Handling waste 5. Before going into the cleanroom DTU Danchip 3

Working with chemicals DTU Danchip 4

Chemical handling intro why? Most accidents and nearby accidents in the cleanroom, happen when handling chemicals DTU Danchip

Health Hazard Serious Health Hazard Acute Toxicity Irritant (skin and eye) Skin sensitizer Respiratory tract irritant Flammable Carcinogen Reproductive toxicity Aspiration toxicity Oxidizing Toxic Fatal Explosive Flammables Pyrophorics Self-reactives Corrosive Oxidizers Hazardous to Environment Explosives Self-reactives Gas Under Pressure DTU Danchip Skin corrosion/burns Corrosive to metals Aquatic toxicity Gases under pressure

Wanting to work with a new chemical Identify the chemical (CAS numbers, name etc.) Navigate to LabManager, General info, Approved chemicals Is the chemical on the approved list? Yes Read the SDS on kemibrug.dk Ask for training training@danchip. dtu.dk No Positive evaluation Write a risk assessment using the template on kemibrug.dk Pass the risk assessment and SDS to the safety officer Safety officer evaluation No Not possible to do at the facility Changes need to be made to the risk assessment DTU Danchip 7

Wanting to work with a setup If you want to work with already approved chemicals, but in a setup not already approved at Danchip e.g. heat up chemicals, mix chemicals or in any way do a setup not already described in LabAdviser, then always write a risk assesment and send it to DTU Danchip s safety officer for evaluation DTU Danchip 8

Working with a new chemical (kemibrug) Buffered Hydrogen Flouride BHF Acetone SulfuricAcid H 2 SO 4 (96-97%) Hydrogen Peroxide H 2 O 2 (30%) DTU Danchip 9

Special attention When working with HF Working with HF/BHF: Outside normal working hours (mon-friday 8am-4pm) You are not allowed to handle (this means all work in fume hoods) chemicals containing HF or BHF. (You are allowed to use the dedicated HF/BHF bath in wet benches, but then the rules from "working with problematic chemistry" are followed. Possibly fatal in contact with skin. Toxic if swallowed or if inhaled. Causes severe skin burns and eye damage. DTU Danchip 10

Special attention When working with TMAH Long known to be very toxic if ingested. Recent experience indicates that skin exposure may result in death. 3 recorded fatalities from skin exposure to 25% TMAH solution. This one Thus skin, exposure to >1% TMAH over a few percent of the body must be treated as a life-threatening event. We only work with 2,38% TMAH DTU Danchip 11

Special attention Working with Nanoparticles Carbon Nanotubes: very long, very Small, and toxic TiO2: Very small and carcinogenic DTU Danchip 12

Fume hoods Wet benches Air blown in through HEPA filters Air taken in through sash opening Air taken in through sash opening DTU Danchip 13

Chemical labeling Safety in Cleanrooms DTU Danchip 14

Chemical transport Never use the elevator together with chemicals! DTU Danchip 15

Chemical transport Safety in Cleanrooms DTU Danchip 16

Leaving setups Safety in Cleanrooms DTU Danchip 17

Personal protection DTU Danchip 18

Personal Protective Equipment Rules when working by the wet benches Dipping wafers into the bath: You should always wear at least one 4H glove and safety glasses (ordinary optical glasses are not sufficient) or face shield! Working in the fume hood Follow the sign in the fume hood, and always work with the hatch at chest level. Example of sign from a fume hood: When working with toxic or corrosive chemicals in the fume hood: Always wear face shield or safety glasses (ordinary glasses are not sufficient), apron and 4H gloves on both hands or or Only one non-standard chemical setup is allowed in the fumehood unless permission is given by a lab technician from Danchip. DTU Danchip 19

Alarm and evacuation DTU Danchip 20

Alarm levels Sound Messageboard Typical cause Light Action Two-tone wobbler EVACUATE Fire or gas Blinking yellow light Immediate evacuation via nearest exit. Meet at building 358 3 sec tone/ 2 sec pause Leave through gowning Insufficient air extraction Blinking yellow light Evacuation Exit through gowning No sound Building 346 closed Danchip resolving issue Blinking yellow light Stay out of building 346 Building is closed DTU Danchip 21

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Mild (soft) evacuation button Mild emergency button in the gowning, can be used in situations where you want everyone to leave the cleanroom but without calling the fire brigade. It can e.g. be used in the following cases: Minor spills of non-toxic chemicals You notice an unknown leakage or spill outside working hours and cannot easily find a Danchip employee Members of the emergency alarm team will ensure that everyone has left the cleanroom and talk to the person who pushed the button. The emergency team will assist in cleaning up the spill and inform everyone via email of the current status. DTU Danchip 23

Hard evacuation buttons Hard evacuations are used in cases of immediate or severe danger such as: Major spill of chemicals Fire Leak of dangerous gases (automatic) Fire brigade is called automatically and will arrive within 2-5 minutes. Emergency team will assist. DTU Danchip 24

Handling waste DTU Danchip 25

Waste handling of acids, bases Restricted acids and bases (e.g. TMAH and Nickel) Must be collected in dedicated waste bottles Non-restricted acids and bases (e.g. KOH, HCl, H 2 SO 4, HNO 3, HF, BHF, H 3 PO 4, ) Aspirator can be used to suck up the chemical Chemicals from small beakers can be poured into a sink inside a fumehood DTU Danchip 26

Waste handling using an aspirator DTU Danchip 27

Waste handling - C-Waste DTU Danchip 28

DTU Danchip Never add oxidizers or strong acids like HCl, HNO 3 or H 2 SO 4 to C-waste!!!!!

Waste handling of bottles containing chemicals Content soluble in water: Rinse the bottle a few times in a fumehood Final rinse on the bottle rinser in the gowning area Content not soluble in water (e.g. resists, PGMEA, N50): Make sure the bottle is empty Place it in the container for solid C-Waste in Cx1 The rules apply equally for plastic and glass containers DTU Danchip 30

Waste handling: Special waste Solid waste (wafers, metal, glass, sharp objects like needles etc) must be collected in specific closed containers Items (wipes, syringes, etc) contaminated with resists or solvents must be placed in dedicated bins for solid C-waste Speak to the lab staff if you have any doubt or questions DTU Danchip 31

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Before going into the cleanroom DTU Danchip 33

We take care of each other and the cleanroom. Therefore receive corrections positively, and do not be afraid to correct other if they do something wrong. DTU Danchip 34

Gowning (dressing) for the cleanroom DTU Danchip 35

After you recived access After having passed the safety course and watched the Lab-system (LabManager/LabAdviser) videos you have to go through two exercises on LabManager and LabAdviser respectively. Further explanation in the mail you recieved when signing up for the course! DTU Danchip 36

Useful DTU Services APPs DTU Injury Google Play Link Apple App Store Link SMS Service DTU Fejlrapportering Google Play Link Apple App Store Link DTU Danchip 37

Further help and instruction after course training@danchip.dtu.dk Attach process flow for speedier response Tool training In the lab, on the tool with your samples Tool authorization When you can operate the tool process_flow@danchip.dtu.dk Feedback and input to process flows YouTube Channel: DTU Danchip Cen Introduction videos to LabManager and equipment DTU Danchip 38