Safety in Cleanrooms

Transcription

1 Safety in Cleanrooms

2 Course structure Prepare for safety course Self study: - Cleanroom rules - Rules for working with wet chemistry Theoretical safety course First part of today Wet chemistry course Second part of today Ends with written test of both theoretical and practical aspects DTU Danchip 2

3 Course agenda first part 1. Working with chemicals 2. Personal protection 3. Alarms and evacuation 4. Handling waste 5. Before going into the cleanroom DTU Danchip 3

4 Working with chemicals DTU Danchip 4

5 Chemical handling intro why? Most accidents and nearby accidents in the cleanroom, happen when handling chemicals DTU Danchip

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7 Wanting to work with a new chemical Identify the chemical (CAS numbers, name etc.) Navigate to LabManager, General info, Approved chemicals Is the chemical on the approved list? Yes Read the SDS on kemibrug.dk Ask for training training@danchip. dtu.dk No Positive evaluation Write a risk assessment using the template on kemibrug.dk Pass the risk assessment and SDS to the safety officer Safety officer evaluation No Not possible to do at the facility Changes need to be made to the risk assessment DTU Danchip 7

8 Working with a new chemical Buffered Hydrogen Flouride BHF Acetone SulfuricAcid H 2 SO 4 (concentrated) Hydrogen Peroxide H 2 O 2 (30%) DTU Danchip 8

9 Special attention When working with HF Possibly fatal in contact with skin. Toxic if swallowed or if inhaled. Causes severe skin burns and eye damage. DTU Danchip 9

10 Special attention When working with TMAH Long known to be very toxic if ingested. Recent experience indicates that skin exposure may result in death. 3 recorded fatalities from skin exposure to 25% TMAH solution. Thus skin, exposure to >1% TMAH over a few percent of the body must be treated as a life-threatening event. DTU Danchip 10

11 Special attention Working with Nanoparticles Carbon Nanotubes: very long, very Small, and toxic TiO2: Very small and carcinogenic DTU Danchip 11

12 Fume hoods Wet benches DTU Danchip 12

13 Safety in Cleanrooms DTU Danchip 13

14 Safety in Cleanrooms DTU Danchip 14

15 Safety in Cleanrooms DTU Danchip 15

16 Personal protection DTU Danchip 16

17 Personal Protection Equipment Rules when working by the wet benches Dipping wafers into the bath. You should always wear at least one 4H glove and safety glasses (ordinary optical glasses are not sufficient) or face shield! Working in the fume hood Follow the sign in the fume hood, and always work with the hatch at chest level. Ex. From the fume hood When working with toxic or corrosive chemicals in the fume hood: Always wear face shield or safety glasses (ordinary glasses are not sufficient), apron and 4H gloves on both hands or or Only one non-standard chemical setup is allowed in the fumehood unless permission is given by a lab technician from Danchip. DTU Danchip 17

18 Rules about aprons DTU Danchip Right! Wrong! 18

19 Alarm and evacuation DTU Danchip 19

20 Alarm levels Sound Messageboard Typical cause Light Action Two-tone wobbler EVACUATE Fire or gas Blinking yellow light Immediate evacuation via nearest exit. Meet at building sec tone/ 2 sec pause Leave through gowning Insufficient air extraction Blinking yellow light Evacuation Exit through gowning No sound Building 346 closed Danchip resolving issue Blinking yellow light Stay out of building 346 Building is closed DTU Danchip 20

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22 Handling waste DTU Danchip 22

23 Waste handling of bottles containing solvents Content soluble in water: Rinse the bottle a few times in a fumehood Final rinse on the bottle rinser in the gowning area Content not soluble in water (e.g. resists, PGMEA, N50): Make sure the bottle is empty Place it in the container for solid C-Waste The rules applies equally for plastic and glass containers Solid C-waste container DTU Danchip 23

24 DTU Danchip Never add oxidizers or strong acids like HCl, HNO 3 or H 2 SO 4 into C-waste!!!!!

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26 Waste handling of acids, bases Restricted acids and bases (e.g. TMAH) Must be collected in dedicated waste bottles Non restricted acids and bases Aspirator can be used to suck up the chemical Chemicals can be poured into a sink DTU Danchip 26

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28 Waste handling of bottles containing acids and bases Rinse the bottle a few times in a fumehood Final rinse on the bottle rinser in the gowning area The rules applies equally for plastic and glass containers Bottle rinser DTU Danchip 28

29 Waste handling Solid waste (wafers, sharp scrap, glass, etc) must be collected in specific closed containers Items (wipes, syringes, etc) contaminated with resists or solvents must be placed in dedicated bins Speak to the lab staff if you have any doubt or question DTU Danchip 29

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31 Collecting waste in bottles Waste bottles should be marked appropriately Use the waste bottle of appropriate material (glass, plastic) and cap which is tight or in special cases ventilated (if the SDS requires it). Do not fill the bottles to the top, leave sufficient space for any gas produced. Filled bottles must be placed on the trolley in the chemical storage room in the basement DTU Danchip 31

32 Before going into the cleanroom DTU Danchip 32

33 We take care of each other and the cleanroom. Therefore receive corrections positively, and do not be afraid to correct other if they do something wrong. DTU Danchip 33

34 Gowning (dressing) for the cleanroom DTU Danchip 34

35 Further help and instruction after course Attach process flow for speedier response Tool training In the lab, on the tool with your samples Tool authorization When you can operate the tool Feedback and input to process flows Introduction videos to LabManager and equipment DTU Danchip 36